ACADEMICIA: An International Multidisciplinary Research Journal
  • Year: 2020
  • Volume: 10
  • Issue: 7

Digital holographic interferometry for the study of various materials and objects of microelectronics

  • Author:
  • Z. T. Azamatov, M. R. Bekchanova, N. N. Bazarboyev, Z. F. Turdiev, B. Bakhromov
  • Total Page Count: 6
  • Page Number: 415 to 420

*Dr. of Phys. and Math., Professor, Head of the Laboratory of The Institute of Semiconductor Physics and Microelectronics, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: zakir.azamatov@mail.ru

**Junior Researcher, Institute of Semiconductor Physics and Microelectronics, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: bekjanovamira@gmail.com

***Senior Researcher, Institute of Semiconductor Physics and Microelectronic, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: bazarbayev@gmail.com

****Master Student, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: zafar.faxriddinovich@gmail.com

Online published on 27 August, 2020.

Abstract

The article considers the possibilities of using digital holographic interferometry in innovative developments for non-destructive testing of various materials and objects of microelectronics.

Keywords

Digital Hologram, Interferogram, Nanotechnology, CCD Matrix