*Dr. of Phys. and Math., Professor, Head of the Laboratory of The Institute of Semiconductor Physics and Microelectronics, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: zakir.azamatov@mail.ru
**Junior Researcher, Institute of Semiconductor Physics and Microelectronics, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: bekjanovamira@gmail.com
***Senior Researcher, Institute of Semiconductor Physics and Microelectronic, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: bazarbayev@gmail.com
****Master Student, National University of Uzbekistan, Tashkent, Uzbekistan, Email id: zafar.faxriddinovich@gmail.com
Online published on 27 August, 2020.
The article considers the possibilities of using digital holographic interferometry in innovative developments for non-destructive testing of various materials and objects of microelectronics.
Digital Hologram, Interferogram, Nanotechnology, CCD Matrix