ACADEMICIA: An International Multidisciplinary Research Journal
  • Year: 2020
  • Volume: 10
  • Issue: 9

Innovative methods of digital holographic interferometry for non-destructive testing of microelectronics products

  • Author:
  • Zakirjan Taxirovich Azamatov1, Nigora Alimdjanovna Akbarova2, Mira Ruzimovna Bekchanova3, M. A. Yoldoshev4, Sanabar Rejepbaevna Reymbaeva5
  • Total Page Count: 10
  • Page Number: 151 to 160

1Professor, Doctor of Physical and Mathematical Sciences, Head of Laboratory "Quantum Electronics and Laser Technology", Research Institute of Semiconductor Physics and Microelectronics at NUUz, Uzbekistan

2Lecturer, Candidate of Technical Sciences, Department of Photography, Faculty of Physics, National University of Uzbekistan Named After Mirzo, Ulugbek, Uzbekistan

3PhD Student, Research Institute of Semiconductor Physics and Microelectronics at NUUz, Uzbekistan

4Research Institute of Semiconductor Physics and Microelectronics at NUUz, Uzbekistan

5Lecturer, Department of Photonics, Faculty of Physics, National University of Uzbekistan Named After Mirzo, Ulugbek, Uzbekistan

Online published on 24 September, 2020.

Abstract

It is shown that digital holographic interferometry methods allow carring out the measurements with nanometric precision and can be fixed in a basis of technology of standardization for measurements of nanometric shifting.

Keywords

Digital Holographic Interferometry, Interferogram, Sensitivity, Fourier Conversion, The Software, Defectoscopy, Nanotechnology