*Department of ECE, Sri Ranganathar Institute of Engineering and Technology, PSG College of Technology, India
**Department of ECE, PSG College of Technology, India
Online published on 2 July, 2016.
Sensitivity and Selectivity are two key parameters in the MEMS based sensor applications. Micro hotplate along with the sensing layer does the sensing applications. Microhotplate is used increase the temperature of the sensing layer to make it more suitable of finding the gas analyte. The work proposes the design of Microhotplate and integrate on a suspended membrane and its Electro – Thermal simulation is reported using COMSOL Multiphysics 4.2. The integration of Polyimide Microheater on a Micromachined substrate provides temperature uniformity across the active area of the device for heating the sensing layer to low temperature and also it makes the sensing layer more sensitive and selective. The optimum temperature of operation of Microheater was found to be 250°C and the power consumption at this operating temperature range was found to be 70mW, when a 5V bias is applied across the resistive beam of the Microheater. Unlike the conventional materials that were used for the design such as SiO2/Si3N4 composite layer the polymer materials shows enhanced performance.
Microheater, Polyimide, MEMS and COMSOL
