Solid State Physics Laboratory, Delhi-110 054.
Deformable or adaptive mirrors are used in modern adaptive optics systems for direct correction of the aberrations in the light wavefront. Conventional deformable mirrors used for this purpose are expensive electromechanical devices. Deformable membrane mirror fabricated using microelectromechanical systems (MEMS) technology is a low cost, compact adaptive optical element for correction of the lower-order optical aberrations such as defocus and astigmatism. In this paper, important aspects of device design and simulation, fabrication techniques, and test results are discussed.
Deformable membrane mirrors, adaptive mirrors, wavefront correction, micromachined deformable mirrors, microelectromechanical systems, adaptive optical systems
