The knowledge of mechanical properties of materials used in microelectromechanical systems (MEMS) devices is critical not only in designing structures such as cantilevers and beams but also for ensuring their reliability during operation of these devices. It has been established that the mechanical properties are scale and-process-dependent, and hence it is essential to measure the mechanical properties of these materials at the same length scale and using the same process as that used in their usage in MEMS devices. The various experimental techniques in vogue to measure the mechanical properties of these materials are briefly reviewed. The facilities established at the Defence Metallurgical Research Laboratory, Hyderabad, and their capabilities are also highlighted.
Mechanical properties, MEMS, microelectromechanical systems, experimental techniques
