Defence Science Journal
  • Year: 2009
  • Volume: 59
  • Issue: 6

Meshless Analysis of Radio Frequency Microelectromechanical Systems Shunt Switch

  • Author:
  • S. Kanthamani, S. Vijay Mohan, S. Raju, V. Abhaikumar, V. Mohan
  • Total Page Count: 5
  • Page Number: 622 to 626

* Thiagarajar College of Engineering, Madurai-15.

** Bigtec Private Limited, Bangalore-560 082.

Abstract

Microelectromechanical systems (MEMS) have found applications in defence as well as in civilian sectors. Analysis of MEMS devices require complex 3-D meshes due to the presence of mechanical and electrostatic energy domains. On the other hand, meshless methods do not require the generation of mesh and perform the computational analysis by just sprinkling the points covering the domain. In this paper, meshless analysis of MEMS switches based on reproducing kernel particle method is reported. Numerical results for the static analysis of the switch are compared with the simulated results obtained using INTELLISUITE MEMS CAD tool.

Keywords

MEMS devices, meshless analysis methods, RF MEMS switches, shunt switches, RF MEMS technology, military communication, coplaner waveguide platform, reproducing kernel particle method, RKPM