* Thiagarajar College of Engineering, Madurai-15.
** Bigtec Private Limited, Bangalore-560 082.
Microelectromechanical systems (MEMS) have found applications in defence as well as in civilian sectors. Analysis of MEMS devices require complex 3-D meshes due to the presence of mechanical and electrostatic energy domains. On the other hand, meshless methods do not require the generation of mesh and perform the computational analysis by just sprinkling the points covering the domain. In this paper, meshless analysis of MEMS switches based on reproducing kernel particle method is reported. Numerical results for the static analysis of the switch are compared with the simulated results obtained using INTELLISUITE MEMS CAD tool.
MEMS devices, meshless analysis methods, RF MEMS switches, shunt switches, RF MEMS technology, military communication, coplaner waveguide platform, reproducing kernel particle method, RKPM