1FIE, FIETE, Department of Electrical & Electronics Engineering, Vignan Institute of Technology and Science, Deshmukhi, Nalgonda Dist., (Hyderabad)-508 284 A.P., India.
2FAeSI, FIETE, School of Science and Humanities, VIT University, Vellore-632 014 T.N., India.
Base for the growth of Carbon Nanotubes by Chemical Vapour Deposition (CVD) is an oven in combination with a gas system. This paper deals with the utilized setups for the gas system. The setup of a CVD system consists of two main parts the oven and the gas system. The most important element is surely the oven. Furthermore several other components are needed, as gas bottles, different types of valves, flowmeters, manometers, tubes and connecting various pieces which build the gas system. The main focus of this paper is about the system setup for gas systems, used to grow carbon nanotubes.
CVD oven, flowmeter, variable area flowmeter, gas systems for oven
