International Journal of Applied Engineering Research

  • Year: 2010
  • Volume: 5
  • Issue: 7

Deposition of TiO2 Thin Film Using Sol- Gel Method

  • Author:
  • Kapil Sirohi1, Mukesh Kumar2, Rajiv Kumar3, Arvind Dewangan4, Nitin Aggarwal5
  • Total Page Count: 8
  • DOI:
  • Page Number: 1097 to 1104

1ECE, Department,H.C.T.M, Kaithal, Haryana, ).

2Electronics science department, kurukshetra university, kurukshetra).

3EEE, Department, H.C.T.M, Kaithal, Haryana).

4Civil, Department, H.C.T.M, Kaithal, Haryana).

5EEE, Department, H.C.T.M, Kaithal, Haryana).

Sub-Area: Electronics.

Abstract

There is great deal of interest in the development of TiO2 thin films, for various application such as a catalyst in self cleaning and antifogging application and use in gas sensor,photovoltaic devices etc. The thin film of TiO2 prepared by a variety of deposition techniques, have attracted wide interest as dielectric, photo catalytic and photovoltaic materials. The sol-gel process allows the preparation of homogeneous materials with controlled structure-property characteristics by chemically modifying the precursor systems. Sol-gel based film processing routes such as dip-coating, spray pyrolysis and spin-coating are usually applied because they are versatile and cost-effective. A better understanding of the thermal behavior of gels formed in a sol-gel process would enable to optimize the post-deposition annealing or deposition conditions and thus improve the properties of TiO2 films.

Keywords

films, Titanium dioxide, Metastable, Sol-Gel