Selection criteria of cost-effective cryogenic system for a cryopump based on heat load estimation

Cryopumps creates vacuum by capturing gas molecules on cryogenic temperature surfaces. Modern commercial cryopumps are cooled by a cryocooler and performance of the cryopumps largely depends on cooling capacity of the cryocooler. This paper discusses estimation method of radiant heat loads on a cryopump. Thermal load was calculated for different emissivity of surfaces and different volume of chamber. Based on calculation, a cost effective cryogenic system for a cryopump was selected from commercially available cryocooler.