Varying the Shape and Size of Nanostructures by using Ion Beam Technology

In this paper we are going to discuss, analyze and perform a progressive and well-controlled variation in the shape of nanostructures of size, having dimensions less than the 10 nm scale. Low energetic ion beam (Ar⁺) is used here for gentle surface erosion, progressively shrinking the dimensions with nearly 1 nm accuracy. This method enables shaping of nanostructure geometry and polishing of the surface. The process is clean room/high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.