Review on Electrostatic Accelerometer

Electrostatic actuation is the most common type of force generation, electromechanical energy conversion scheme in micro-mechanical systems. It is the most excellent example of an energy-storage transducer. Such transducers store energy when either mechanical or electrical work is done on them. In MEMS, electrostatic forces are often used to actuate microstructures, including switches electrostatic motors etc. Electrostatic accelerometer is analysed using comb drive structure. Comb drives are the most commonly used actuators for moderate in plane micro-displacements and micro forces. They are also often used as motion sensing in accelerometers.