International Journal of Managment, IT and Engineering
  • Year: 2013
  • Volume: 3
  • Issue: 5

Nanomaterials for silicon nanotechnology

  • Author:
  • E. N. Ganesh
  • Total Page Count: 16
  • Page Number: 374 to 389

Professor, RIT, Chennai, India

Online published on 24 October, 2013.

Abstract

Nanomaterials could play important roles in the silicon nanotechnology platform. Silicon nanotechnology is the production reality and follows famous Moore's law. There are some significant challenges must be overcome for nanomaterials to be useful in future silicon technology. As silicon scaling leads to materials challenge for fabrication, package, interconnects and lithography, new structures like molecular assembly, macromolecules and sub 100 nm structures are needed in the future. This paper discuss about nanomaterials needed for Lithography challenges and Resist challenges. Silicon devices with materials like strained silicon, poly silicon and silicides are incorporated which overcomes the challenges mentioned above. This paper also describes about the characterization, analysis, electrical and mechanical properties of the mentioned nanostructures. We also simulated nanostructures like molecular structures, Spin quantum dots, nanowiers and nanotubes using nanomaterials.