International Journal of Scientific Engineering and Technology

  • Year: 2014
  • Volume: 3
  • Issue: 1

Mems Technology

  • Author:
  • Popat R. Thorat, Shilpa M. Gaikwad
  • Total Page Count: 5
  • DOI:
  • Page Number: 31 to 35

EC Department, Savitribai Phule Women's Engineering College, Maharashtra, India

Abstract

“Micromechatronic is the synergistic integration of microelectromechanical systems, electronic technologies and precision mechatronics with high added value. ”This field is the study of small mechanical devices and systems.they range in size from a few microns to a few millimeters. This field is called by a wide variety of names in different parts of the world: micro electro mechanical systems (MEMS), micromechanics, Microsystems technology (MST), micro machines.this field which encompasses all aspects of science and technology, is involved with things one smaller scale. Creative people from all technical disciplines have important contributions to make. A world now occupied by an explosive new technology known as MEMS (Micro Electro Mechanical systems).

Keywords

Electrostatics, Electromechanics, MEMS, pullin voltage