Design and Simulation of a MEMS Magnetometer

This paper presents the design and simulation of a MEMS magnetometer which utilizes Lorentz force transduction mechanism. The device is based on the standard xylophone beam which is used as the resonating structure. The out-of-plane structure is used which can detect magnetic field in y direction based on the working principle of the device. Nickel is used as the device structural layer and the input parameter is optimized based on the thermal constraints. Both the benefits and limitations are discussed. The device operated at the resonant frequency in order to achieve the maximum mechanical output.