Department of Information and Communication Engineering, Myongji University, Yongin, Kyunggi-Do, 449–728, South Korea
*Email id: hadeoksong@mju.ac.kr
**** shan@mju.ac.kr
Online published on 2 August, 2016.
In order to obtain a conventional FE-SEM image, measurement and analysis of semiconductor pattern is processed using coupon wafers. The gold or silver coating is a conventional preprocessing to obtain the FE-SEM image for the non-conductive coupon wafer. The visibility of FE-SEM image depends upon the amount of Pt coating, andan average amount of Pt coating is 30Å. However the effect of image visibility enhancement by the amount of Pt coating is subjective and a standard criteria is needed to determine the visibility enhancement of the image. In this paper, a standard process is suggested to determine the relationship between the visibility enhancement of the image and the amount of Pt coating using the gradient of the pixel brightness of the FE-SEM image.
FE-SEM, Hitachi S-5000, SEM image, Pt coating, Semiconductor
