Comparative Analysis of Eigen Frequency and Stress RF MEMS Resonator

MEMS are widely used in Communication circuit system and its enabled to recognition of micro system mechanical structure in electronics devices. MEMS are the combination of electrical and mechanical function on the same substrate by the bulk micro machine and surface to fabricate and to design microstructures. These microstructures are used in application such as biomedical, industrial sensors, telecommunication and optical communication. As MEMS switches are widely used in different actuation methods as electrostatic, electromagnetic, electro thermal, and piezoelectric. The objective of this research is comparative study of various design of Cantilever MEMS Resonator. The beam of resonator is made up of poly-silicon. This research analysis Eigen frequency MEMS resonator. The resonator used in oscillator which can be fabricated on chip. It can also be used as Switch. The size of crystal oscillator is in order of centimetre but the size of MEMS Resonator is in order of microns, so by replace a crystal oscillator by MEMS Resonator, we can reduce the size of the system. The force is applied given to the beam of resonator for analysis stress and Eigen frequency analysis in different modes.