Water and Energy Abstracts
  • Year: 2007
  • Volume: 17
  • Issue: 2

Industrial Relevance of Deep Junctions Produced by Rapid Thermal Processing for Power Integrated Circuits

  • Author:
  • J.M. Dilhac, L. Cornibert, B. Morillon, S. Roux, C. Ganibal

(IEEE, Piscataway, NJ, USA, pp. 237-240).

Keywords

Vertical junction, Physical and electrical results