Water and Energy Abstracts
  • Year: 2007
  • Volume: 17
  • Issue: 2

Direct-drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

  • Author:
  • Patrice Minotti, Philippe Langlet, Gilles Bourbon, Takahisa Masuzawa, Patrice Le Moal

(Technomic Publ Co Inc, Lancaster, PA, USA, pp. 829-836).

Keywords

Electrostatic micromotors, Microactuators, Torque sensor