Journal of Innovation in Mechanical Engineering

Electrostatic actuators are widely used in the MEMS devices because of their simple construction and compatibility with micro fabrication processes. However, the interaction of non-linear electrostatic force with linear elastic force results in a phenomenon called pull-in instability, which imposes serious limits on the travelling range of the micro actuator. There are two types of pull-in instabilities: Static and Dynamic. Accurate prediction of static and dynamic pull-in parameters (pull-in voltage and pull-in displacement) is hence essential in the design of such micro devices. The present work deals with the analysis of both the pull-in instabilities in Electro Static Micro Cantilever (ESMC) actuator. Static and dynamic analysis is carried out using a simulation technique based on finite element method using COMSOL multiphysics. The prismatic configuration of ESMC actuators has been taken for the analysis. The actuator is modeled and simulated in COMSOL. Static and dynamic pull-in parameters of the prismatic ESMC are obtained through COMSOL. The results of static and dynamic analysis are compared with the results of Ritz energy technique. They are good in agreement.